MTI Instruments contracted an independent Metrology expert to test and verify the performance of a new high resolution capacitance gauge. The Accumeasure HD has passed in house testing where its performance was tested against a commercial laser interferometer (See Application Note). Optical Metrology Solutions (OMS) was chosen based on their extensive experience and proximity to MTI’s manufacturing plant.
OMS was tasked with designing a challenging experiment to verify the accuracy and resolution of the MTI Accumeasure HD capacitance system that could also be encountered in a typical customer application. Their experiment explored the ability to measure sub-nonometer thermal expansion of a ceramic material, specifically a 6-millimeter thick optical mirror, across a range of temperatures.
The Accumeasure HD performed exceptionally well measuring sub-nanometer thermal expansion in a space typically dominated by more expensive and complex laser interferometers. The full results of the experiment are available in the whitepaper summarizing the experiment below.
