Blogs
LITHOGRAPHY OPTICS POSITION FOCUS
Industry Semiconductor Applications Photolithography Using Capacitance Sensors Measurement Type Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex lens systems such as those found in atomic force microscopes, vision inspection machines and photolithography tools. In a multi-million dollar photolithography tool, high accuracy, nanometer resolution and maximum thermal stability are absolutely critical to maintain proper focus and obtain integrated circuit line widths as small as 45 nanometers. Additionally, most systems demand low power consumption and maximum heat dissipation to eliminate any adverse affects from [...]
Monitor Roller Gaps and Parallelism
Monitor Roller Gaps and Parallelism Industrial Printing, Calendering, Crushing Gap Easy Roller Gap Measurement Ensures Calendering Success Many roll-to-roll finishing processes typically use a calender, or series of hard pressure rollers, to deliver smooth, high-quality products of plastic, textile, or paper (Fig 1). Ensuring a consistent material thickness, however, depends on the ability to monitor, and maintain, a precise gap between rollers. This application note describes a quick and easy means for roller gap measurement. Figure 1: Calender Rollers where consistent gap across the rollers are vital [...]
GAAS SUBSTRATE THICKNESS MEASUREMENT
Industry Semiconductor Applications Gaas Substrate Thickness Measurement Measurement Type Thickness Description Measuring Thickness of Wafers with Different Chemistries Introduction: Silicon wafers are ordinarily highly conductive and easy to measure with standard capacitive displacement sensors (See MTI’s Proforma 300i). Measuring the thickness of GaAs wafers that have high bulk resistivity (>10k Ohm/cm) is a little more difficult because the wafers act as non-conductive insulators in a capacitive sensor’s measuring field. Fortunately, MTI has a solution to this problem. Solution: It’s possible to measure the thickness and TTV of high resistivity semiconducting wafers (like GaAs) using non-contact capacitive [...]
Capacitance Probes Measure Gaps in Rotating Environments
Capacitance Probes Measure Gaps in Rotating Environments Textiles, Industrial Optimizing Performance of Rotating Cylinders Gap Description [Application Note 72518] Sensor environments are not always ideal. Across the various Gap sensor applications conditions may vary drastically. Some setups may have requirements of miniaturization, and others of wireless signal propagation. In rotating environments where cables cannot go, often there is a need for both. Problem Traditional sensing solutions can’t be used in environments requiring wireless propagation such as inside a rotating body. In these situations, the size and power requirements restrict the [...]
Signal Generator Simulates Gas Turbine Speed Signals
Signal Generator Simulates Gas Turbine Speed Signals Aviation, Power Generation Simulation of Speed Signals Amplitude, Displacement Description [Application Note 61318] Gas turbine engines are complex machines comprised of two rotating sections, generally referred to as the low pressure compressor (N1) and the high pressure compressor (N2). These turbine sections feature separate shafts that produce unique tachometer signals. Gas turbine engines have multiple rotating sections generally referred to as the low pressure compressor (N1) and the high pressure compressor (N2). These turbine sections have separate shafts that produce unique tach [...]
SPINDLE RUN OUT
Industry Automotive Applications Spindle Run Out Measurement Type Positioning Description Rotating targets frequently have an intermittent, uncertain or nonexistent ground path. This introduces unwanted noise, instability, drift and reduces accuracy of the measurement. MTI Instruments offers a unique “Push-Pull” capacitance measurement system that does not require a grounded target. It utilizes two probes, built into one body, that work together to complete the ground path. One probe pushes current into the brake rotor while the adjacent probe pulls the current out. The result is a “clean”, consistent electrical sensing path. As [...]
Signal Generator Tests Charge Amplifier Gain, Frequency Response GallerySignal Generator Tests Charge Amplifier Gain, Frequency Response
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Signal Generator Tests Charge Amplifier Gain, Frequency Response
Testing Charge Amplifier Gain and Frequency Response with a Signal Generator Aviation/Aerospace, Industrial, Power Generation, Research & Development Charge Amplifier Gain and Frequency Response Testing Amplitude (Acceleration, Vibration, Pressure) Description [Application Note 40518] Piezoelectric transducers produce small electrical charges in response to pressure. Their sensitivity, ruggedness, and stability at high temperatures make them an essential building block of many accelerometers and pressure sensors. Applications include turbine vibration measurement (accelerometers) and combustion dynamics monitoring (pressure sensors). Typically, the high-impedance charge output produced by a piezoelectric transducer must be conditioned and amplified [...]
Capacitance Sensors Track Brake Rotor Thickness Variation
Capacitance Sensors Track Brake Rotor Thickness Variation Automotive, Aviation/Aerospace Brake Rotor Testing & Manufacturing Displacement, Amplitude Description [Application Note 51018]Today’s cars and trucks offer unprecedented fuel efficiencies and handling characteristics – thanks, in part, to vehicle lightweighting. Applied to all vehicle components, lightweighting lowers stress and strain to improve mileage and boost overall performance.In keeping with this trend, today’s brake rotors are thinner and lighter than those of just a few years ago. In addition, many feature cooling vents to further improve performance. These changes, however, reduce available braking surface, forcing [...]
CAPACITANCE SENSORS FACILITATE 3D IC CONSTRUCTION
[Application Note 70518] To boost device performance, today’s semiconductor and microelectronics manufacturers are building three-dimensional integrated circuits featuring vertically-stacked silicon wafers and dies. The rationale is simple. Exploiting the Z-axis avoids the power and footprint penalties associated with two-dimensional processes. Implementing the rationale, however, is not so simple. Going vertical requires coplanar surfaces to make contact with all pins, pads, and pillars. Problem Typically, manufacturers measure the angle and gap between two planes to determine coplanarity. Bonding tool actuators rely on these angle/gap measurements to adjust components and make sure all device pins and/or solder balls reside on the [...]
Wireless Measurement of Very Small Gap Changes Inside Rotating Machinery
Solar, Semiconductor Measurement of Ungrounded Targets Thickness, Metrology Description Description This application note describes how to use capacitance for the non-contact, wireless measurement of very small gap changes (distances) between a device and a grounded target. It uses the textile industry as an example, but any industry that uses machinery with continuously rotating drums or motors can benefit from this approach to remote measurement. Capacitance is highly accurate and can support the use of probes that are wireless. In our example, a capacitive sensing system from MTI Instruments eliminated concerns about establishing and maintaining [...]